번호 |
장비 |
장비명(목적) |
담당자 |
위치 |
22 |
|
Prism Coupler |
|
public clean room (different building) |
21 |
|
MOCVD |
|
public clean room (different building) |
20 |
|
He Leak detector |
|
public clean room (different building) |
19 |
|
PECVD |
|
public clean room (different building) |
18 |
|
이온주입 공정 장비 |
|
public clean room (different building) |
17 |
|
E-beam I |
|
public clean room (different building) |
16 |
|
E-beam evaporator |
|
public clean room (different building) |
15 |
|
RF Magnetron Sputter |
|
public clean room (different building) |
14 |
|
RTA |
|
public clean room (different building) |
13 |
|
ICP RIE |
|
public clean room (different building) |