| 번호 |
장비 |
장비명(목적) |
담당자 |
위치 |
|
22 |
|
Prism Coupler
|
|
public clean room (different building) |
|
21 |
|
MOCVD
|
|
public clean room (different building) |
|
20 |
|
He Leak detector
|
|
public clean room (different building) |
|
19 |
|
PECVD
|
|
public clean room (different building) |
|
18 |
|
이온주입 공정 장비
|
|
public clean room (different building) |
|
17 |
|
E-beam I
|
|
public clean room (different building) |
|
16 |
|
E-beam evaporator
|
|
public clean room (different building) |
|
15 |
|
RF Magnetron Sputter
|
|
public clean room (different building) |
|
14 |
|
RTA
|
|
public clean room (different building) |
|
13 |
|
ICP RIE
|
|
public clean room (different building) |
Total 32
