전남대학교MNTL연구소
 
작성일 : 12-12-28 15:19
   Furnace, wafer oxidation (한결산업, LHA-12450).bmp  [0] DATE : 2012-12-28 15:19:28
분류 : Fabrication
 Furnace, wafer oxidation (한결산업, LHA-12450)
 
Place AFM실
Dealer 한결산업
Date 2006.05.02
Project Name
Purpose Oxidation
Responsible Person 박종성


A list of additional components
Detailed specification
-Thermal oxidation (Wet and dry)
-Tube inside diameter : 25 ~ 150mm
-뛰어난 온도 Uniform zone 제공
-Mesh cover, natural air cooling
-Heat treatment, Firing
-분위기 gas 하에서 다양한 연구.
-Wafer oxidation, diffusion.
-Type : Horizontal or Vertical
 
-Max operating
-temperature: 1200
-Furnace bore(mm): 160
-Heated length(mm): 450
-Heating element
-Temperature control
-External size(mm): 670(H)×676(W)×468(D)