-Thermal oxidation (Wet and dry)
-Tube inside diameter : 25 ~ 150mm
-뛰어난 온도 Uniform zone 제공
-Mesh cover, natural air cooling
-Heat treatment, Firing
-분위기 gas 하에서 다양한 연구.
-Wafer oxidation, diffusion.
-Type : Horizontal or Vertical
-Max operating
-temperature: 1200℃
-Furnace bore(mm): 160
-Heated length(mm): 450
-Heating element
-Temperature control
-External size(mm): 670(H)×676(W)×468(D)