전남대학교MNTL연구소
 
작성일 : 12-12-28 15:24
   Electroplating bath and power, Cu only.bmp  [0] DATE : 2012-12-28 15:24:32
분류 : Fabrication
 Electroplating bath and power, Cu only
 
Place CR
Dealer 성원포밍
Date 2010
Project Name
Purpose Cu electroplating
Responsible Person 박종성


A list of additional components
Detailed specification
-4 inch wafer
-piece wafer
-Au layer is desired as a conducting layer
 
-thermal controller
-water pump