전남대학교MNTL연구소
 
작성일 : 12-12-31 11:33
   Probe station(TAS, TAS100M).bmp  [0] DATE : 2012-12-31 11:33:44
분류 : measurement
 Probe station(TAS, TAS100M)
 
Place 계측실
Dealer TAS
Date 2006
Project Name
Purpose Probe station
Responsible Person 박종성


A list of additional components
 
Detailed specification
 
I-V characteristics of micro devices
 
- 4inch manual probe station
- 100mm×100mm stage
- Max sample size: 4inch
- Manual stage drive
- Vacuum pump
- Microscope body with 1.8× to 11×zoom