Moterized XYZ-stage with controller.bmp [0] DATE : 2012-12-31 11:39:49 |
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Moterized XYZ-stage with controller |
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Place |
1A-004 |
Dealer |
OMA |
Date |
2007.12.24 |
Project Name |
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Purpose |
자동제어를 통한 미세한 이동이 필요한 샘플 구동 |
Responsible Person |
박종성 |
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A list of additional components
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Detailed specification
-Travel : 150mm -Resolution : 0.5um -Uni-directional repeatability : 0.7um -Maximum speed : 100mm/sec -Load capacity : 250N -On Axis Accuracy : 2.5um per 100mm *GTS30V -Travel : 30mm -Resolution : 0.05um -Bi-directional repeatability : 0.2um -Maximum speed : 10mm/sec -Load capacity : 40N -On Axis Accuracy : 0.5um
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