전남대학교MNTL연구소
 
작성일 : 12-12-31 11:39
   Moterized XYZ-stage with controller.bmp  [0] DATE : 2012-12-31 11:39:49
분류 : other
 Moterized XYZ-stage with controller
 
Place 1A-004
Dealer OMA
Date 2007.12.24
Project Name
Purpose 자동제어를 통한 미세한 이동이 필요한 샘플 구동
Responsible Person 박종성


A list of additional components
Detailed specification
-Travel : 150mm  -Resolution : 0.5um -Uni-directional repeatability : 0.7um  -Maximum speed : 100mm/sec -Load capacity : 250N  -On Axis Accuracy : 2.5um per 100mm
*GTS30V
-Travel : 30mm  -Resolution : 0.05um
-Bi-directional repeatability : 0.2um -Maximum speed : 10mm/sec  -Load capacity : 40N -On Axis Accuracy : 0.5um