작성일 : 12-12-31 11:44
 Piezo xyz stage with controller(Nanomax).bmp [0] DATE : 2012-12-31 11:44:25 | ||||||||||||||||
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 A list of additional components |
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Detailed specification -Travel: 4mm -Thermal stability: 1mm/℃ -Load capacity: 2.2lbs(1kg) -Weight: 1.65lbs(0.75kg) -Deck height: 62.5mm -Optical Axis height: 75mm -Piezo range: 20µm -Piezo resolution: 20nm(5nm with strain gauge) -Piezo bidirectional repeatability: open loop 0.2µm, closed loop 0.05µm -Piezo drive voltage: 0 to 75V -No load: 375Hz |
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Piezo xyz stage with controller(Nanomax)![Piezo xyz stage with controller(Nanomax).bmp [0] DATE : 2012-12-31 11:44:25](javascript:file_download('./download.php?bo_table=Fabrication&wr_id=223&no=0&sca=other&page=4', 'Piezo xyz stage with controller(Nanomax).bmp');){kind=link}
