전남대학교MNTL연구소
 
작성일 : 12-12-31 17:10
   Manual XYZ-stage-1(2대).bmp  [0] DATE : 2012-12-31 17:10:04
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 Manual XYZ-stage-1(2대)
 
Place 계측실
Dealer 파워텍
Date 2007.01
Project Name
Purpose 측정소자 미세이동시 사용
Responsible Person 박종성


A list of additional components
Detailed specification
-Stage sirface : 80×80mm
-Microneter head position : side
-Travel distance : XY(±12.5mm),Z(±5.0mm)
-Micrometer Min, Reading : 10µm/div
-Travel guide : V-groove & Crossed-roller
-Load capacity : 2.8kgf -Parallelism : 150µm
-Driving perpendicularity : 30µm
-Weight : 1.7kg -Size : 151×136×82mm