작성일 : 13-01-02 15:04
 Nanoscan, non-contact type.bmp [0] DATE : 2013-01-02 15:04:03 | ||||||||||||||||
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 A list of additional components |
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Detailed specification 샘플의 표면을 높은 분해능(~2nm) 으로 분석 및 측정
-Inter ferometric objectives: single lens available -Scanrange: 0-180um(option270um) -Vertical resolution: WSI: <0.5nm/PSI: 0.1nm> -Stagetilt : ±3 -Z stroke: 30mm(manual) -Workpiece stage: 50*50mm(manual) |
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Nanoscan, non-contact type![Nanoscan, non-contact type.bmp [0] DATE : 2013-01-02 15:04:03](javascript:file_download('./download.php?bo_table=Fabrication&wr_id=304&no=0&sca=measurement&page=2', 'Nanoscan, non-contact type.bmp');){kind=link}
