전남대학교MNTL연구소
 
작성일 : 13-01-02 17:13
   SEM(HITACHI, S-2400).bmp  [0] DATE : 2013-01-02 17:13:51
분류 : measurement
 SEM(HITACHI, S-2400)
 
Place 1A-004
Dealer HITACHI
Date 2009.12.02
Project Name
Purpose 샘플분석 및 관찰
Responsible Person 박종성


A list of additional components
Detailed specification
-Mag: 20~300,000X
-Accel. voltage: 0.5kV~25keV
-Resolution: 4.0nm
-Filament: Precentered hairpin
-Bias method: Autobias
-Mechanical alignment