작성일 : 13-01-02 17:13
SEM(HITACHI, S-2400).bmp
[0]
DATE : 2013-01-02 17:13:51
분류 : measurement
SEM(HITACHI, S-2400)
Place
1A-004
Dealer
HITACHI
Date
2009.12.02
Project Name
Purpose
샘플분석 및 관찰
Responsible Person
박종성
A list of additional components
Detailed specification
-Mag: 20~300,000X
-Accel. voltage: 0.5kV~25keV
-Resolution: 4.0nm
-Filament: Precentered hairpin
-Bias method: Autobias
-Mechanical alignment