Not allowed to use AFM except a person who is a responsible.
샘플표면을 원자수준으로 이미지 및 마이크로/나노 패턴 형성
-SPM controller and Data acquisition system
-X,Y flexture 100um scanner with closed - loop feedback control
-Scanning 12um manual micro meter
-25mm X,Y manual micrometer
-Active Vibration isolation system
-Enhance acousitic enclosure with steel frame
-Enhance EFM
-Nanolithography