전남대학교MNTL연구소
 
작성일 : 13-01-02 17:45
   Atomic Force Microscope.bmp  [0] DATE : 2013-01-02 17:45:01
분류 : measurement
 Atomic Force Microscope
 
Place AFM실
Dealer Park systems
Date 2009.10
Project Name
Purpose 샘플의 표면을 원자크기로 형상화
Responsible Person 박종성


A list of additional components
Detailed specification
Not allowed to use AFM except a person who is a responsible.
샘플표면을 원자수준으로 이미지 및 마이크로/나노 패턴 형성

-SPM controller and Data acquisition system
-X,Y flexture 100um scanner with closed - loop feedback control
-Scanning 12um manual micro meter
-25mm X,Y manual micrometer
-Active Vibration isolation system
-Enhance acousitic enclosure with steel frame
-Enhance EFM
-Nanolithography