작성일 : 12-12-28 10:55
 Mask_aligner.bmp [0] DATE : 2012-12-28 10:55:27 | ||||||||||||||||
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 A list of additional components |
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Detailed specification -Light source module
-UV light: 350~450nm
-Max intensity: 20mw/cm2
-Microscope
-Stage and controller
-Resolution : vacuum contact: 1um
-Mask holder: 5inch
-Sample size: 4inch and piece wafers
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Mask aligner![Mask_aligner.bmp [0] DATE : 2012-12-28 10:55:27](javascript:file_download('./download.php?bo_table=Fabrication&wr_id=87&no=0&sca=Fabrication&page=5', 'Mask_aligner.bmp');){kind=link}
