작성일 : 12-12-28 11:18
 Spin coater, PR coating (Midas, 1200).bmp [0] DATE : 2012-12-28 11:18:16 | ||||||||||||||||
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 A list of additional components- 4 inch wafer chuck - Piece wafer chuck |
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Detailed specification Photoresist coating
- 4ich chuck - piece wafer chuck Keep clean always
- Chuck rotation speed: 300~7000rpm
- Spin state: 2steps - Substrate size: piece ~4inch Si wafer - Oil-less vacuum pump |
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Spin coater, PR coating (Midas, 1200)![Spin coater, PR coating (Midas, 1200).bmp [0] DATE : 2012-12-28 11:18:16](javascript:file_download('./download.php?bo_table=Fabrication&wr_id=90&no=0&sca=Fabrication&page=5', 'Spin coater, PR coating (Midas, 1200).bmp');){kind=link}
