작성일 : 12-12-28 11:24
 Hot plate with vacuum chuck (sawatec, HP-150).bmp [0] DATE : 2012-12-28 11:24:26 | ||||||||||||||||
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 A list of additional components |
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Detailed specification 4 inch wafer and AZ PR(<10um) only
Keep clean always
-Max. substrate size 150mm
-Substrat fixation via vacuum manual controlled -Size: 300x250x120mm(LxBxH) -Hotplate size: 164x164mm -Temperature range: 25- 250 ℃ -Accuracy of temperature: +/-1℃ by 100 ℃ -Required medias: 240 VAC 50/60Hz(350W) -Weight approx. 7kg |
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Hot plate with vacuum chuck (sawatec, HP-150)![Hot plate with vacuum chuck (sawatec, HP-150).bmp [0] DATE : 2012-12-28 11:24:26](javascript:file_download('./download.php?bo_table=Fabrication&wr_id=91&no=0&sca=Fabrication&page=5', 'Hot plate with vacuum chuck (sawatec, HP-150).bmp');){kind=link}
