작성일 : 12-12-28 11:36
O₂_Asher.bmp
[0]
DATE : 2012-12-28 11:36:24
분류 : Fabrication
O₂ Asher(Plasma finish,V6-G)
Place
CR
Dealer
KAMI
Date
2006.04.28
Project Name
Purpose
PR remove by O2
Responsible Person
박종성
A list of additional components
-테플론 홀더
-vacuum pump
Detailed specification
-Chamber size(mm): 170(W)×170(H)×200(D)
-Gas channel
-Vacuum gauge: pirani
-Microwave power generator
-Frequency: 2.45GHz
-Power: 50 ~ 300Watt
-Vacuum pump