An Introduction to Microelectromechanical systems engineering, Second Edition, Maluf and Williams, Artech House Publishers
CHAPTER 1: MEMS - A Technology from Lilliput
CHAPTER 2: Materials for MEMS
CHAPTER 3: Processes for Micromachining
CHAPTER 4: MEM Structures and Systems in Industrial and Automotive Applications
CHAPTER 5: MEM Structures and Systems in Photonic Applications
CHAPTER 6: MEMS Applications in Life Sciences
CHAPTER 7: MEM Structures and Systems in RF Applications
CHAPTER 8: Packaging and Reliability Considerations for MEMS
Fundamentals of Microfabrication, 2nd Ed., Marc Madou, CRC Press, 1997.
Micromachined Transducers: Sourcebook, Gregory T.A. Kovacs, McGraw-Hill, 1998.
Semiconductor Manufacturing Technology, Michael Quirk/Julian Serda, Prentice Hall, 2001.
Introduction to Microelectronic fabrication, 2nd Ed., Richard C. Jaeger, Prentice Hall, 2001.
Electronic Journal in MEMS
Journal of Microelectromechanical systems (http://www.ieeexplore.ieee.org)
Journal of micromechanics and microengineering (http://www.iop.org/EJ/journal/JMM)
Sensors and Actuators (http://www.elsevier.com/locate/sensors)
Microsystem technologies (http://www.springerlink.com)
MEMS and Nanotechnology Reading List
Here's a list of suggested texts for learning more about MEMS and Nanotechnology.
Marc Madou, Fundamentals of Microfabrication, CRC Press 1997, ISBN 0-8493-9451-1
Julian W. Gardner, Microsensors: Principles and Applications, Wiley 1994, ISBN 0-4719-4135-2
Gregory Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill 1998, ISBN 0-0729-0722-3
Héctor J. De Los Santos, Introduction to Microelectromechanical (MEM) Microwave Systems, Artech House 1999, ISBN 0-8900-6282-x
Sergey Edward Lyshevski, Nano- and Microelectromechanical Systems, CRC Press 2000, ISBN 0-8493-0916-6
P. Rai-Choudhury, ed., Handbook of Microlithography, Micromachining, and Microfabrication, Vol 1 and Vol 2, SPIE Press and IEE Press 1997, ISBN 0-8529-6906-6 (Vol 1) and 0-8529-6911-2 (Vol 2)
Mohamed Gad-el-Hak, ed., The MEMS Handbook, CRC Press 2001, ISBN 0-8493-0077-0
P. Rai-Choudhury, ed., MEMS and MOEMS: Technology and Applications, SPIE Press Monograph 2000, ISBN 0-8194-3716-6
Julian W. Gardner, and Vijay K. Varadan, and Osama O. Awadelkarim, Microsensors, MEMS and Smart Devices, Wiley 2001, ISBN 0-4718-6109-X
Nadim Maluf, An Introduction to Microelectromechanical Systems Engineering, Artech House 1999, ISBN 0-8900-6581-0
Randy Frank, Understanding Smart Sensors, 2nd ed., Artech House 2000, ISBN 0-8900-6311-7
Ljubisa Ristic, ed., Sensor Technology and Devices, Artech House 1994, ISBN 0-8900-6532-2
Vijay Varadan, Xiaoning Jiang, and Vasundara Varadan, Microstereolithography and other Fabrication Techniques for 3D MEMS, Wiley 2001, ISBN 0-4715-2185-X
Tai-Ran Hsu, MEMS and Microsystems: Design and Manufacture, McGraw-Hill 2001, ISBN 0-0723-9391-2
Remco J. Wiegerink, Miko Elwenspoek, Mechanical Microsensors (Microtechnology and MEMS), Springer Verlag 2001, ISBN 3-5406-7582-5
Gabriel M. Rebeiz, RF MEMS: Theory, Design, and Technology, 2001
Bernard Courtois, Serge Demidenko, eds., Design, Characterization, and Packaging for MEMS and Microelectronics, SPIE 2001, ISBN 0-8194-3494-9
Stephen D. Senturia, Microsystem Design, Kluwer 2000, ISBN 0-7923-7246-8
S. M. Sze, ed., Semiconductor Sensors, Wiley 1994, ISBN 0-4715-4609-7
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