Final report

 

Optimize a pressure sensor in a pressure range of 0~100kPa : find diaphragm deflection as a function of pressure, find resonance frequency, optimize linearity and sensitivity at the given pressure range

Drawing masks using L-edit: 4 mask(open window, doping, metal deposition, back side etching

Mask generation: how you generate masks 

Describe pressure sensor fabrication in details: understand each step in details (cleaning, photolithography, etching etc)

Draw fabrication process: use computer software and it has 3D information

 

Describe operation principle and fabrication steps of an inkjet head driven by an array of microheaters

 

Prof. DW Lee