작성일 : 19-04-30 08:54
Introduction to MEMS Report 1
 글쓴이 : 이동원
조회 : 537  
   20190430 MEMS 기초 R1_01.pdf  DATE : 2019-04-30 08:54:35
   20190430 MEMS 기초 R1_02.pdf  DATE : 2019-04-30 08:54:35
   20190430 MEMS 기초 R1_03.pdf  DATE : 2019-04-30 08:54:35
Pressure sensor design
- piezoresistive
- pressure range 100 ~450 kPa
- silicon