전남대학교MNTL연구소

Total 44

번호	장비명(목적)	담당자	위치
24	Wet-station (Ultech, TMAH) Wet station	박종성	CR
23	Wet-station (CSY, Organic) Wet station	박종성	CR
22	Wet-station (CSY, Acid) Wet station	박종성	YR
21	Oven for photoresist bake Oven	박종성	YR
20	Electroplating bath and power, Cu only Cu electroplating	박종성	CR
19	Hot plate (Corning, PC-400D)	박종성	CR
18	Hot plate (AS ONE) Hot plate	박종성	CR
17	Hot plate 7 Hot plate	박종성	YR
16	Furnace, wafer oxidation (한결산업, LHA-12450) Oxidation	박종성	AFM실
15	Clean booth 2 Clean booth (Photolithography)	박종성	AFM실

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