작성일 : 13-01-02 15:02
 Surface profiler, contact type.bmp [0] DATE : 2013-01-02 15:02:31 | ||||||||||||||||
|
||||||||||||||||
|
||||||||||||||||
|
||||||||||||||||
 A list of additional components |
||||||||||||||||
|
Detailed specification 수 나노부터 수 마이크로 사이즈의 샘플 두께를 접촉식으로 측정
-Stylus force: 1 to 15mg with LIS 3 sensor -Scan Length Range: 55mm standard -Data Points Per Scan: 120,000 maximum -Max. Sample Thickness: Up to 90mm -Max. Wafer Size: 150mm -Step Height Repeatability: <=6Å -Vertical Range: 524μm -Vertical Resolution: 1Å max. |
||||||||||||||||
Surface profiler, contact type ![Surface profiler, contact type.bmp [0] DATE : 2013-01-02 15:02:31](javascript:file_download('./download.php?bo_table=Fabrication&wr_id=303&no=0&sca=measurement&page=2', 'Surface profiler, contact type.bmp');){kind=link}
