전남대학교MNTL연구소

Total 44

번호	장비명(목적)	담당자	위치
14	Clean booth 1 Clean booth (Oxidation and mask generation)	박종성	YR
13	Clean bench 1 Clean bench	박종성	YR
12	IR-thermometer IR thermometer	박종성	YR
11	Vacuum oven(Jeiotech,OV-11) Vacuum oven	박종성	계측실
10	Ultrasonic(4science,JAC 2010) US for mask and wafer cleaning	박종성	YR
9	O₂ Asher(Plasma finish,V6-G) PR remove by O2	박종성	CR
8	Pattern generator (μPG 501) Pattern generator	박종성	CR
7	Digital UV intensity meter for mask aligner UV Intensity meter	박종성	계측실
6	Hot plate 6(Labotec, DP-1M) Hot plate for TMAH	박종성	계측실
5	Hot plate 1, 2, 3, 4, 5 Hot plate	박종성	YR

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