Smart micro-four-point probe
SU-8 cantilevers integrated with high-sensitive strain gauges
Switchable cantilevers for a time-of-flight scanning force microscope
Low-cost AFM system
Thermal probe array for maskless nanolithography
PDMS cantilever for biomedical applications
SENSORS & ACTUATORS
High-sensitive strain sensor
Metal oxide gas sensors
Silicon or polymer actuators
Optically transparent superhydrophobic thin film
Tunable electronics based on liquid metal
PDMS-based coplanar microfluidic channels
Microfluidic Platform to Manipulate Oxidized Galinstan
Miniaturized energy harvesting technology
Flexible triboelectric generator
Miniaturized high-efficient energy harvester using hydrogel
Magnetically coupled piezoelectric energy harvester
Electromagnetic Energy Harvesting Device Based on Windmill Structure
MEDICAL DEVICES
Cantilever-based microsystem for high-throughput drug screening applications
Smart stent integrated with battery-less pressure sensor
Soft and transparent tactile sensors
System integration