■ Tel: 062-530-1684
■ E- mail: mems@jnu.ac.kr
■ School of Mechanical Engineering, Chonnam National University, Korea(3. 2004 - now)
■ Carrier
1. Research staff, IBM Research Division, Zurich Research Laboratory, Switzerland 11. 2001 - 2. 2004(Director: Ch. Gerber and P. Vettiger)
2. Lecture, Dept. of Precession and Engineering, Tohoku University, Japan (4. 2001 - 11. 2001)
3. Teaching assistant, Dept. of Precession and Engineering,Tohoku University, Japan 10. 1998 - 3. 2000 (Mathematics, 10. 1998 -3. 1999; Computer Interface, 4. 1999 - 9. 1999; Creation Engineering, 10. 1999 - 3. 2000)
4. Ph. D. in Mechanics and Electronics Engineering, Tohoku University, Sendai, Japan 4. 1998 - 3. 2001 (Supervisor: Prof. Masayoshi Esashi)
■ Equipment experience
EB lithography (Hitachi, JEOL, Elionix), G-line stepper, Single and double sides aligner, CVD (TEOS, AP etc.), Sputter (Ion beam, Helicon, RF, DC etc.), Evaporator (Electron beam and thermal), Oxidation furnace, STS ICP-RIE, FAB (fast atom beam), FIB (focused ion beam), SEM (scanning electron microscope), AFM (atomic force microscope), STM (scanning tunneling microscope), etc.
■ Language
Native in Korean, Fluent in Japanese, Experienced in English, Basic in German.
