Final report
Optimize a pressure sensor in a pressure range of 0~100kPa : find diaphragm deflection as a function of pressure, find resonance frequency, optimize linearity and sensitivity at the given pressure range
Drawing masks using L-edit: 4 mask(open window, doping, metal deposition, back side etching
Mask generation: how you generate masks
Describe pressure sensor fabrication in details: understand each step in details (cleaning, photolithography, etching etc)
Draw fabrication process: use computer software and it has 3D information
Describe operation principle and fabrication steps of an inkjet head driven by an array of microheaters
Prof. DW Lee