전남대학교MNTL연구소

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작성일 : 17-05-15 11:29
Introduction to MEMS [Mask design]
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   20170511 Mask design Ex.pdf  DATE : 2017-05-15 11:29:55
Mask design for pressure sensor
Mask 1. Crystal orientation
Mask 2. Doping
Mask 3. Contact
Mask 4. Metallization
Mask 5. Backside silicon etch
 
You also can add some test structures for characterization of electrical resistivity, pattern resolution, doping concentration etc.